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Research Project 4: Advanced nanopatterning for EUV thermal and acoustic nanometrologies

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Margaret Murnane

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Andrew Minor

Lead
Jeff Jessing

Lead

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Any opinions, findings, and conclusions or recommendations expressed on this website are those of the participants and do not necessarily reflect the views of the National Science Foundation or the participating institutions. This site is maintained collaboratively by principal investigators with Partnership for Research and Education in Materials awards, independent of the NSF.